Nano-scale SONOS memory with a double-gate MOSFET structure

Journal of the Korean Physical Society

Volumn 42, Issue 2, 2003, Pages 233-236

  Cho, Il Hwan ^a   Park, Byung Gook ^a   Lee, Jong Duk ^a   Lee, Jong Ho ^b  

^a Seoul National University   (South Korea)

^b Kyungpook National University   (South Korea)

Author keywords

Double gate FinFET; Scaling of flash memory; Sidewall process; SONOS

Indexed keywords

EID: 0037296050     PISSN: 03744884     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Conference Paper

References (5)

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