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Volumn 34, Issue 2, 2003, Pages 211-224

Inertial focusing of particles with an aerodynamic lens in the atmospheric pressure range

Author keywords

Aerodynamic lens; Inertial focusing; Orifice; Particle beam; Particle focusing

Indexed keywords

AERODYNAMICS; ATMOSPHERIC PRESSURE; LASER APPLICATIONS; LIGHT SCATTERING; ORIFICES; PARTICLE BEAMS; REYNOLDS NUMBER;

EID: 0037295557     PISSN: 00218502     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0021-8502(02)00158-1     Document Type: Article
Times cited : (23)

References (14)
  • 1
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    • Numerical study on the particle beam and particle motion through a critical orifice
    • Ahn J.H., Ahn K.H. Numerical study on the particle beam and particle motion through a critical orifice. Transactions of the KSME (B). 23(10):1999;1240-1247.
    • (1999) Transactions of the KSME (B) , vol.23 , Issue.10 , pp. 1240-1247
    • Ahn, J.H.1    Ahn, K.H.2
  • 2
    • 0345337265 scopus 로고    scopus 로고
    • Investigation of aerosol spatial distributions downstream of a critical orifice at low pressure
    • Bae G.N., Kinney P.D., Liu B.Y.H., Pui D.Y.H. Investigation of aerosol spatial distributions downstream of a critical orifice at low pressure. Aerosol Science and Technology. 28(6):1998;479-488.
    • (1998) Aerosol Science and Technology , vol.28 , Issue.6 , pp. 479-488
    • Bae, G.N.1    Kinney, P.D.2    Liu, B.Y.H.3    Pui, D.Y.H.4
  • 6
    • 0030286292 scopus 로고    scopus 로고
    • Particle behavior in vacuum systems: Implications for in-situ particle monitoring in semiconductor processing equipment
    • Kinney, P.D., Bae, G.N., Pui, D.Y.H., & Liu, B.Y.H. (1996). Particle behavior in vacuum systems: Implications for in-situ particle monitoring in semiconductor processing equipment. Journal of the Institute of Environmental Sciences, 40-45.
    • (1996) Journal of the Institute of Environmental Sciences , pp. 40-45
    • Kinney, P.D.1    Bae, G.N.2    Pui, D.Y.H.3    Liu, B.Y.H.4
  • 8
    • 0029278226 scopus 로고
    • Generating particle beams of controlled dimensions and divergence: I. Theory of particle motion in aerodynamic lenses and nozzle expansions
    • Liu P., Ziemann P.J., Kittelson D.B., McMurry P.H. Generating particle beams of controlled dimensions and divergence. I. Theory of particle motion in aerodynamic lenses and nozzle expansions Aerosol Science and Technology. 22:1995;293-313.
    • (1995) Aerosol Science and Technology , vol.22 , pp. 293-313
    • Liu, P.1    Ziemann, P.J.2    Kittelson, D.B.3    McMurry, P.H.4
  • 9
    • 0029278150 scopus 로고
    • Generating particle beams of controlled dimensions and divergence: II. Experimental evaluation of particle motion in aerodynamic lenses and nozzle expansions
    • Liu P., Ziemann P.J., Kittelson D.B., McMurry P.H. Generating particle beams of controlled dimensions and divergence. II. Experimental evaluation of particle motion in aerodynamic lenses and nozzle expansions Aerosol Science and Technology. 22:1995;314-324.
    • (1995) Aerosol Science and Technology , vol.22 , pp. 314-324
    • Liu, P.1    Ziemann, P.J.2    Kittelson, D.B.3    McMurry, P.H.4
  • 11
    • 0348117866 scopus 로고
    • Ph.D. thesis, The Johns Hopkins University, Baltimore, MD
    • Riley, J.J. (1971). Ph.D. thesis, The Johns Hopkins University, Baltimore, MD.
    • (1971)
    • Riley, J.J.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.