Optimizing the detection efficiency of a low pressure, in-situ particle monitor using aerodynamic focusing lenses

Institute of Environmental Sciences - Proceedings, Annual Technical Meeting

Volumn , Issue , 1996, Pages 217-224

  Liu, P ^a   Rao, N P ^a   Kittelson, D B ^a   McMurry, P H ^a  

^a UNIVERSITY OF MINNESOTA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AEROSOLS; CONTAMINATION; LASER APPLICATIONS; LENSES; LIGHT SCATTERING; OPTIMIZATION; PARTICLES (PARTICULATE MATTER);

AERODYNAMIC FOCUSING LENSES; IN SITU PARTICLE MONITOR (ISPM);

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0030311716     PISSN: 00739227     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (0)