Technology computer-aided design modelling of single-atom doping for fabrication of buried nanostructures

Nanotechnology

Volumn 14, Issue 2, 2003, Pages 157-160

  Pakes, C I ^a   George, D P ^a   Jamieson, D N ^a   Yang, C J ^a   Dzurak, A S ^b   Gauja, E ^b   Clark, R G ^b  

^a UNIVERSITY OF MELBOURNE   (Australia)

^b UNIVERSITY OF NEW SOUTH WALES   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER AIDED DESIGN; COMPUTER SIMULATION; ELECTRIC SPACE CHARGE; ELECTRODES; ION IMPLANTATION; SEMICONDUCTOR DEVICE MANUFACTURE; SEMICONDUCTOR DEVICE STRUCTURES; SEMICONDUCTOR DOPING; SUBSTRATES;

ELECTRICAL REGISTRATION PROCESS; SINGLE-ATOM DOPING; SOLID-STATE QUANTUM COMPUTER; TECHNOLOGY COMPUTER AIDED DESIGN;

NANOSTRUCTURED MATERIALS;

EID: 0037292755     PISSN: 09574484     EISSN: None     Source Type: Journal    
DOI: 10.1088/0957-4484/14/2/311     Document Type: Article

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