Grinding characteristics of solid immersion mirrors with the ELID grinding method

Key Engineering Materials

Volumn 238-239, Issue , 2003, Pages 83-88

  Uehara, Y ^a   Ohmori, H ^a   Yamagata, Y ^a   Moriyasu, S ^a   Suzuki, T ^a,b   Ueyanagi, K ^b   Adachi, Y ^b   Wakabayashi, K ^b  

^a INST OF PHYS AND CHEMICAL RESEARCH   (Japan)

^b XEROX CORPORATION   (United States)

Author keywords

ELID grinding; Hemi paraboroidal; Solid immersion mirror

Indexed keywords

LENSES; MACHINE TOOLS; MIRRORS; OPTICAL RECORDING; OPTICS;

CONTACT PROBE; ELECTROLYTIC IN PROCESS DRESSING; FOUR AXIS ULTRAHIGH PRECISION MACHINE TOOL; ON-MACHINE MEASUREMENT; SOLID IMMERSION MIRRORS;

GRINDING (MACHINING);

EID: 0037285034     PISSN: 10139826     EISSN: 16629795     Source Type: Book Series    
DOI: 10.4028/www.scientific.net/kem.238-239.83     Document Type: Article

References (7)

1. Chul Woo Lee, et al., "Feasibility Study on Near Field Optical Memory Using a Catadioptic Optical System", Tech. Dig. Of ODS '98, WA4, (1998) P.137.
2. Kiichi Ueyanagi and Takao Tomono, "Proposal of a Near-Field Optical Head using a New Solid Immersion Lens", Tech. Dig. Of ISOM/ODS '99, ThC5, (1999) P.364; USP-No.6,154,326.
3. Koichiro Kishima, et al., "Challenge for Near-Field Recording beyond 50 Gbit/in2", Tech. Dig. Of ISOM 2001, Fr-N-05, (2001) P.242.
4. Hideki Saga, et al., "A New Recording Method Combining Thermo-Magnetic Writing and Flux Detection", Tech. Dig. Of ISOM '98, Pd-8 (1998), P.188.
5. Hitoshi Ohmori, "Electrolytic In-Process Dressing (ELID) Grinding for Optical Parts Manufacturing", International Progress in Precision Eng. IPES, 7 (1993), P.134-148.
6. Sei Moriyasu, et al., "Development of Ultraprecision Vertical-type Contact-Probe for On-Machine From Measurement", ISSAT2000, (2000), P.309-312.
7. Yutaka Yamagata, et al., "Fabrication of micro mechanical and optical components by ultra-precision cutting", SPIE's MM96 Symposium (1996), Microelectronic Structures and MEMS for optical Processing, SPIE Volume 2881 (1996), P.148-157.