Fabrication of micromechanical and optical components by ultraprecision cutting

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2881, Issue , 1996, Pages 148-157

  Yamagata, Yutaka ^a   Higuchi, Toshiro ^a   Takashima, Yuzuru ^a   Ueda, Katsunobu ^a  

^a KANAGAWA ACADEMY OF SCIENCE AND TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

MICROMECHANICAL COMPONENTS; ULTRAPRECISION CUTTING;

CUTTING; FABRICATION; HOLOGRAPHY; LITHOGRAPHY; MECHANISMS; MICROMACHINING; OPTICAL RESOLVING POWER; PRECISION ENGINEERING; STAINLESS STEEL;

MICROELECTRONICS;

EID: 0030405954     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (2)