Contrast enhancement of modulated optical reflectance microscopy of semiconductor devices

Review of Scientific Instruments

Volumn 74, Issue 1 II, 2003, Pages 559-562

  Dietzel, D ^a   Roecken, H ^a   Bein, B K ^a   Pelzl, J ^a  

^a RUHR UNIVERSITY BOCHUM   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC CURRENTS; ELECTRIC POTENTIAL; ION IMPLANTATION; LIGHT MODULATION; LIGHT REFLECTION; OPTICAL MICROSCOPY;

CONTRAST ENHANCEMENT;

SEMICONDUCTOR DEVICES;

EID: 0037283670     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1512962     Document Type: Conference Paper

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