Two dimensional antireflection microstructure on silica glass

Journal of the Ceramic Society of Japan

Volumn 111, Issue 1289, 2003, Pages 24-27

  Nishii, Junji ^a   Kintaka, Kenji ^a   Kawamoto, Yasushi ^b   Mizutani, Akio ^c   Kikuta, Hisao ^c  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

^b Moritex Corporation   (Japan)

^c Osaka Prefecture University   (Japan)

Author keywords

Antireflection; Grating; Microstructure; Photolithography; Silica glass

Indexed keywords

ANTIREFLECTION COATINGS; DIFFRACTION GRATINGS; ETCHING; IRRADIATION; MICROSTRUCTURE; PARAMAGNETIC RESONANCE; PHOTOLITHOGRAPHY; SUBSTRATES; SURFACE TREATMENT; THIN FILMS;

TWO-BEAM INTERFERENCE METHOD;

FUSED SILICA;

EID: 0037276565     PISSN: 09145400     EISSN: None     Source Type: Journal    
DOI: 10.2109/jcersj.111.24     Document Type: Article

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