Design of a shallow thermally stable ohmic contact to p-type InGaSb

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 21, Issue 2, 2003, Pages 633-640

  Wang, S H ^a   Mohney, S E ^a   Hull, B A ^a   Bennett, B R ^b  

^a PENNSYLVANIA STATE UNIVERSITY   (United States)

^b NAVAL RESEARCH LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; ELECTRIC RESISTANCE; INTERFACES (MATERIALS); SEMICONDUCTING INDIUM COMPOUNDS; THERMODYNAMIC STABILITY;

CONTACT RESISTANCES;

OHMIC CONTACTS;

EID: 0037274219     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1545731     Document Type: Article

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