In2O3 thin films obtained through a chemical complexation based sol-gel process and their application as gas sensor devices

Journal of Sol-Gel Science and Technology

Volumn 26, Issue 1-3, 2003, Pages 741-744

  Epifani, Mauro ^a   Capone, S ^a   Rella, R ^a   Siciliano, P ^a   Vasanelli, L ^a   Faglia, G ^b   Nelli, P ^b   Sberveglieri, G ^b  

^a CNR   (Italy)

^b UNIVERSITY OF BRESCIA   (Italy)

Author keywords

Chemical complexation; Gas sensors; Indium oxide; Inorganic precursors

Indexed keywords

ADHESION; CHEMICAL SENSORS; COMPLEXATION; ELECTRIC RESISTANCE; GLASS; INDIUM COMPOUNDS; METHANOL; OZONE; PRECIPITATION (CHEMICAL); SOL-GELS; SPIN COATING; THERMOANALYSIS; X RAY DIFFRACTION ANALYSIS;

PRECIPITATION-PEPTIZATION PROCESS;

THIN FILMS;

EID: 0037271966     PISSN: 09280707     EISSN: None     Source Type: Journal    
DOI: 10.1023/A:1020754306392     Document Type: Conference Paper

References (5)

1. T. Takada, in Chemical Sensor Technology, vol. 2, edited by T. Seiyama (Elsevier, Amsterdam, 1989), p. 59.
2. T. Takada, K. Suzuki, and M. Nakane, Sensor and Actuators B 13/14, 404 (1993).
3. W.Y. Chung, G. Sakai, K. Shimanoe, N. Miura, D. Lee, and N. Yamazoe, Sensor and Actuators B 46, 139 (1998).
4. A. Gurlo, M. Ivanovskaya, N. Barsan, M. Schweizer-Berberich, U. Weimar, W. Gopel, and A. Dieguez, Sensor and Actuators B 44, 327 (1997).
5. C. Cantalini, W. Wlodarski, H.T. Sun, M.Z. Atashbar, M. Passacantaudo, and S. Cantucci, Sensors and Actuators B 65, 101 (2000).