Investigation of various metal silicide field emitters and their application to field emission display

Journal of the Electrochemical Society

Volumn 150, Issue 1, 2003, Pages

  Uh, Hyung Soo ^a   Park, Sang Sik ^a  

^a Sejong University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON BEAMS; ELECTRON EMISSION; EVAPORATION; FIELD EMISSION DISPLAYS; OXIDATION; PHOSPHORS; RAPID THERMAL ANNEALING; SECONDARY ION MASS SPECTROMETRY; X RAY PHOTOELECTRON SPECTROSCOPY; ZINC OXIDE;

ELECTRON BEAM EVAPORATION; METAL SILICIDE FIELD EMITTER; POLY-SILICON FIELD EMITTER; SILICIDATION;

SILICON COMPOUNDS;

EID: 0037257827     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1521758     Document Type: Article

References (18)

1. I. Brodie and P. R. Schwoebel, Proc. IEEE, 82, 1005 (1994).
2. D. A. Cathey, Inf. Disp., Oct, 16 (1995).
3. D. R. Whaley, B. M. Gannon, C. R. Smith, C. M. Armstrong, and C. A. Spindt, IEEE Trans. Plasma Sci., 28, 727 (2000).
4. H. S. Uh, S. J. Kwon, and J. D. Lee, IEEE Trans. Electron Dev. Lett., 16, 488 (1995).
5. Y. Hori, K. Koga, and K. Sakiyama, Tech. Dig. - Int. Electron Devices Meet., 1995, 393.
6. M. Takai, M. Yamashita, H. Willie, S. Yura, S. Horibata, and M. Ototake, Appl. Phys. Lett., 66, 422 (1995).
7. H. C. Cheng, T. K. Ku, B. B. Hsieh, S. H. Chen, S. Y. Leu, C. C. Wang, C. F. Chen, I. J. Hsieh, and J. C. M. Huang, Jpn. J. Appl. Phys., Part 1, 34, 6926 (1995).
8. C. C. Wang, T. K. Ku, I. J. Hsieh, and H. C. Cheng, Jpn. J. Appl. Phys., Part 1, 35, 368 (1996).
9. T. Su, C. L. Lee, and J. C. M. Huang, Tech. Dig. - Int. Electron Devices Meet., 1991, 765.
10. W. P. Dyke and W. W. Dolan, in Advances in Electronics and Electron Physics, Vol. III, Academic Press, New York (1956).
11. F. Charbonnier, in Proceedings of the 9th International Vacuum Microelectronics Conference Technical Digest, IEEE/Electron Devices Society, p. 10, July 7-12, 1996.
12. K. N. Tu, J. W. Mayer, and L. C. Feldman, in Electronic Thin Film Science, Chap 2, Macmillan Publishing Co., New York (1992).
13. H. Adachi and H. Nakane, in Proceedings of the International Display Works, Conference, The Society for Information Display, p. 779, Nov 19-21, 1997.
14. Q. Mei, T. Tamagawa, C. Ye, Y. Lin, S. Zurn, and D. L. Polla, J. Vac. Sci. Technol. B, 11, 493 (1993).
15. O. Nishikawa, H. Koyama, M. Tomitori, and F. Iwawaki, J. Vac. Sci. Technol. B, 9, 789 (1991).
16. E. J. Chi, J. Y. Shim, and H. K. Baik, in Proceedings of the 9th International Vacuum Microelectronics Conference Technical Digest, IEEE/Electron Devices Society, p. 188, July 7-12, 1996.
17. J. Chen, J.-P. Colinge, D. Flandre, R. Gillon, J. P. Raskin, and D. Vanhoenacker, J. Electrochem. Soc., 144, 2437 (1997).
18. A. Vecht, D. W. Smith, S. S. Chadha, C. S. Gibbons, J. Koh, and D. Morten, J. Vac. Sci. Technol. B, 12, 781 (1994).