Effect of the Coil Angle in an Inductively Coupled Plasma Torch: A Novel Two-Dimensional Model

Plasma Chemistry and Plasma Processing

Volumn 23, Issue 2, 2003, Pages 245-263

  Xue, Siwen ^a   Proulx, Pierre ^a   Boulos, Maher I ^a  

^a UNIVERSITÉ DE SHERBROOKE   (Canada)

Author keywords

Coil angle effect; Concentric cylinder coil; Electromagnetic field; Inductive plasma; Swirling

Indexed keywords

BOUNDARY CONDITIONS; CONVERGENCE OF NUMERICAL METHODS; CURRENT DENSITY; ELECTRIC COILS; ELECTRIC FIELD EFFECTS; ELECTROMAGNETIC FIELDS; ELECTROSTATICS; FREQUENCIES; MAGNETIC FIELD EFFECTS; PLASMA FLOW; PROBLEM SOLVING; SWIRLING FLOW; TEMPERATURE MEASUREMENT; THERMAL EFFECTS; VECTORS; VELOCITY MEASUREMENT;

COIL ANGLE EFFECT; CONCENTRIC CYLINDER COILS; INDUCTIVE PLASMA;

PLASMA TORCHES;

EID: 0037250905     PISSN: 02724324     EISSN: None     Source Type: Journal    
DOI: 10.1023/A:1022929501406     Document Type: Article

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