Singapore synchrotron light source - Status, first results, program

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 199, Issue , 2003, Pages 536-540

  Moser, H O ^a   Chew, E P ^a   Kempson, V C ^a   Kong, J R ^a   Li, Z W ^a   Nyunt, Tun ^a   Qian, H J ^a   Rossmanith, R ^a   Tor, P H ^a   Wilhelmi, O ^a   Yang, P ^a   Zheng, H W ^a   Underhay, I J ^a,b  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

^b OXFORD INSTRUMENTS PLASMA TECHNOLOGY   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROMAGNETIC WAVE ABSORPTION; IMAGING TECHNIQUES; INFRARED SPECTROSCOPY; LIGHT SOURCES; LITHOGRAPHY; NANOTECHNOLOGY; RESEARCH AND DEVELOPMENT MANAGEMENT; X RAY DIFFRACTION;

SYNCHROTRON LIGHT SOURCE;

SYNCHROTRON RADIATION;

EID: 0037243220     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(02)01596-3     Document Type: Conference Paper

References (6)

1. B.T.G. Tan, A.J. Bourdillon, SAL Business Summit for X-ray Lithography, Burlington, Vermont, 28 September 1998, unpublished.
2. H.O. Moser, V.C. Kempson, P. Yang, E.P. Chew, Z.W. Li, T. Nyunt, B.T.G. Tan, R. Rossmanith, I.J. Underhay, in: Proceedings of the Asian Particle Accelerator Conference APAC'01, Beijing, 2001.
3. R. Rossmanith, H.O. Moser, A. Geisler, A. Hobl, D. Krischel, M. Schillo, in: Proceedings of the 8th European Particle Accelerator Conference EPAC'02, Paris, 2002.
4. W.L. Tsai, P.C. Hsu, Y. Hwu, J.H. Je, Y. Ping, H.O. Moser, A. Groso, G. Margaritondo, Nucl. Instr. and Math. B, these proceedings. PII: S0168-583X(02)01537-9.
5. Smith N. Phys. Today. 54/1:2001;29.
6. Dattoli G., Doria A., Gallerano G.P., Giannessi L., Hesch K., Moser H.O., Ottaviani P.L., Pellegrin E., Rossmanith R., Steininger R., Saile V., Wuest J. Nucl. Instr. and Meth. A. 474:2001;259.