Preparation of titanium nitride films from amide precursors synthesized by electrolysis

Journal of the American Ceramic Society

Volumn 86, Issue 1, 2003, Pages 177-179

  Shimada, Shiro ^a   Hasegawa, Marika ^a  

^a HOKKAIDO UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL ANALYSIS; CRYSTALLIZATION; CURRENT DENSITY; ELECTRIC CONDUCTIVITY; ELECTROLYSIS; GRAIN SIZE AND SHAPE; HEAT TREATMENT; PARTICLE SIZE ANALYSIS; SYNTHESIS (CHEMICAL); TITANIUM NITRIDE; X RAY DIFFRACTION ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY;

GALVANOSTATIC ELECTROLYSIS;

METALLIC FILMS;

EID: 0037236367     PISSN: 00027820     EISSN: None     Source Type: Journal    
DOI: 10.1111/j.1151-2916.2003.tb03298.x     Document Type: Article

References (8)

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5. T. Wade, J. Park, E. G. Garza, C. B. Ross, D. M. Smith, and R. M. Crooks, "Electrochemical Synthesis of Ceramic Materials: II, Synthesis of A1N and an A1N Polymer Precursor: Chemistry and Materials Characterization," J. Am. Chem. Soc., 114, 9457-64 (1992).
6. K. Nakajima and S. Shimada, "Electrochemical Synthesis of TiN Precursors and Their Conversion to Fine Particles," J. Mater. Chem., 8, 955-59 (1998).
7. Powder Diffraction File, Card No. 38-1420. International Centre for Diffraction Data, Newtown Square, PA.
8. E. F. Kaelble (ed.), Handbook of X-ray. McGraw-Hill, New York, 1967.