New wafer-scale fabrication method for stacked optical waveguide interconnects and 3D micro-optic structures using photoresponsive (inorganic-organic hybrid) polymers

Optical Materials

Volumn 21, Issue 1-3, 2003, Pages 475-483

  Streppel, Ulrich ^a   Dannberg, P ^a   Wachter C ^a   Brauer A ^a   Frohlich L ^b   Houbertz, R ^b   Popall, M ^b  

^a FRAUNHOFER INSTITUTE FOR APPLIED OPTICS AND PRECISION ENGINEERING   (Germany)

^b Fraunhofer Institute of Silicate Research   (Germany)

Author keywords

Inorganic organic hybrid polymer; Non linear index change; Photosensitivity; Stacked polymer waveguides; UV patterning; Vertical integration

Indexed keywords

CROSSLINKING; OPTICAL INTERCONNECTS; OPTICAL WAVEGUIDES; PHOTOLITHOGRAPHY;

STACKED POLYMER WAVEGUIDES;

POLYMERS;

EID: 0037210789     PISSN: 09253467     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-3467(02)00186-6     Document Type: Conference Paper

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