Active and passive components of 3D integrated optics

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3936, Issue , 2000, Pages 130-138

  Waechter, C ^a   Bauer, Th ^a   Cumme, M ^a   Dannberg, P ^a   Elflein, W ^a   Hennig, Th ^a   Streppel, U ^a   Karthe, W ^a  

^a FRAUNHOFER INSTITUTE FOR APPLIED OPTICS AND PRECISION ENGINEERING   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

GEOMETRICAL OPTICS; INTERFEROMETERS; OPTICAL WAVEGUIDES; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; REACTIVE ION ETCHING; SILICON COMPOUNDS;

MICROOPTICAL STRUCTURE;

INTEGRATED OPTICS;

EID: 0033877713     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (14)