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Volumn 101, Issue 3, 2002, Pages 269-274
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Study of injection molding pressure sensor with low cost and small probe
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Author keywords
Injection molding; MEMS; Pressure sensor; PZT
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Indexed keywords
COSTS;
DYNAMIC RESPONSE;
INJECTION MOLDING;
LEAD COMPOUNDS;
LITHOGRAPHY;
MICROELECTROMECHANICAL DEVICES;
PIEZOELECTRICITY;
SILICA;
SPUTTERING;
SURFACE ROUGHNESS;
INJECTION MOLDING PRESSURE SENSOR;
LEAD ZIRCONATE TITANATE;
PRESSURING SENSING ELEMENT;
SENSORS;
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EID: 0037202408
PISSN: 09244247
EISSN: None
Source Type: Journal
DOI: 10.1016/S0924-4247(02)00217-0 Document Type: Article |
Times cited : (17)
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References (8)
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