Micromachining of a silicon multichannel microprobe for neural electrical activity recording

Sensors and Actuators, A: Physical

Volumn 99, Issue 1-2, 2002, Pages 119-124

  Moldovan, Carmen ^a   Ilian, V ^a   Constantin, Ghe ^a   Iosub, Rodica ^a   Modreanu, M ^a   Dinoiu, Ioana ^a   Firtat, B ^a   Voitincu, C ^a  

^a NATIONAL INSTITUTE FOR RESEARCH AND DEVELOPMENT IN MICROTECHNOLOGIES   (Romania)

Author keywords

Anisotropic etching; Design; Micromachining; Multichannel microprobe

Indexed keywords

ANISOTROPY; CELLS; ELECTRIC PROPERTIES; ETCHING; INTEGRATED CIRCUIT MANUFACTURE; MICROMACHINING; NEUROLOGY; OPTICAL RECORDING; SILICON SENSORS; TISSUE;

MULTICHANNEL MICROPROBES;

MICROSENSORS;

EID: 0037197301     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(01)00901-3     Document Type: Conference Paper

References (5)

1. A two-wire, digital output multichannel microprobe for recording single-unit neural activity
2. A high yield IC compatible multichannel recording array
3. Integrated sensors: Key to future VLSI systems
4. Anisotropic etching of silicon in a complexant redox alkaline system