Experimental investigation of laser induced forward transfer process of metal thin films

Applied Surface Science

Volumn 186, Issue 1-4, 2002, Pages 221-226

  Sano, T ^a   Yamada, H ^a   Nakayama, T ^a   Miyamoto, I ^a  

^a OSAKA UNIVERSITY   (Japan)

Author keywords

Direct writing; Laser induced forward transfer; LIFT process; Thin film patterning

Indexed keywords

EXCIMER LASERS; LASER PULSES; QUARTZ; SPUTTER DEPOSITION; SUBSTRATES;

LASER INDUCED FORWARD TRANSFER (LIFT);

THIN FILMS;

EID: 0037185174     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(01)00765-6     Document Type: Article

References (20)