Novel plasma approach for the synthesis of highly fluorinated thin surface layers

Langmuir

Volumn 18, Issue 24, 2002, Pages 9393-9400

  Cruz Barba, L Emilio ^b   Manolache, Sorin ^b   Denes, Ferencz ^a,b  

^a University of Wisconsin Madison   (United States)

^b UNIVERSITY OF WISCONSIN MADISON   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; CHEMICAL BONDS; CONTACT ANGLE; ELECTRON SPECTROSCOPY; GONIOMETERS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; REACTION KINETICS; SURFACE PROPERTIES; SYNTHESIS (CHEMICAL);

CONTACT ANGLE GONIOMETRY; FLUORINATED THIN SURFACE LAYERS;

FLUORINE CONTAINING POLYMERS;

EID: 0037180602     PISSN: 07437463     EISSN: None     Source Type: Journal    
DOI: 10.1021/la026032c     Document Type: Article

References (23)

1. Savage, C. R.; Timmons, R. B; Lin, J. W. Adv. Chem. Ser. 1993, 236, 745-768.
2. Limb, S. J.; Gleason, K. K.; Edell, D. J.; Gleason, E. F. J. Vac. Sci. Technol., A 1997, 15, 1814-1818.
3. Denes, F.; Hua, Z. Q.; Young, R. A.; Shohet, J.L. Plasmas Polym. 1997, 2, 1-23.
4. Denes, F.; Hua, Z. Q.; Simonsick, W. J.; Aaserud, D. J. J. Appl. Polym. Sci. 1999, 71, 1627-1639.
5. Cotton, F. A., Wilkinson, G. Advanced Inorganic Chemistry; John Wiley & Sons: New York, 1988; p 509.
6. Coburn, J. W.; Chen, M. J. Appl. Phys. 1980, 51, 3134-3136.
7. d'Agostino, R.; Cramarossa, F.; De Benedicts, S.; Ferraro, G. J. Appl. Phys. 1981, 52, 1259-1265.
8. Donnelly, V. M.; Flamm, D. L.; Dautremont-Smith, W. C.; Werder, D. J. Appl. Phys. 1984, 55, 242-252.
9. Gottscho, R. A.; Donnelly, V. M. J. Appl. Phys. 1984, 56, 245-250.
10. Richards, A. D.; Thompson, B. E.; Allen, K. D.; Sawin, H. H. J. Appl. Phys. 1987, 62, 792-798.
11. Malyshev, M. V.; Donnelly, V. M. J. Vac. Sci. Technol., A 1997, 15, 550-558.
12. Martin, W. C.; Fuhr, J. R.; Kelleher, D. E.; Musgrove, A.; Podobedova, L.; Reader, J.; Saloman, E. B.; Sansonetti, C. J.; Wiese, W. L.; Mohr, P. J.; Olsen, K. NIST Atomic Spectra Database 2002 (version 2.0). Database available online at http://physics.nist.gov/asd National Institute of Standards and Technology: Gaithersburg, MD, accessed March 1, 2002.
13. Olthoff, J. K.; Van Brunt, R. J.; Benck, E. C.; Roberts, J. R. Phys. Rev. E 1996, 54, 1876-1887.
14. Petri, R.; Sadeghi, N.; Henry, D. J. Vac. Sci. Technol., A 1995, 13, 2930-2934.
15. Peignon, M. C.; Cardinaud, Ch.; Turban, G. J. Appl. Phys. 1991, 70, 3314-3323.
16. Beamson, G.; Briggs, D. High-Resolution XPS of Organic Polymers - The Scienta ESCA300 Database; John Wiley & Sons Ltd: Chichester, U.K., 1992; pp 226-232.
17. Thermo Galactic. Spectra Online 2002. Database available online at http://spectra.galactic.com/SpectraOnline/Default_ie.htm. Thermo Galactic: Salem, NH, accessed August 18, 2002.
18. Bellamy, L. J. The Infrared Spectra of Complex Molecules: Advances in Infrared Group Frequencies; Chapman & Hall: New York, 1980.
19. Youngblood, J. P.; McCarthy, T. J. Macromolecules 1999, 32, 6800-6806.
20. Chen, W.; Fadeev, A. Y.; Hsieh, M. C.; Oner, D.; Youngblood, J.; McCarthy, T. J. Langmuir 1999, 15, 3395-3399.
21. Oner, D.; McCarthy, T. J. Langmuir 2000, 16, 7777-7782.
22. Coulson, S. R.; Woodward, I. S.; Badyal, J. P. S. Chem. Mater. 2000, 12, 2031-2038.
23. Inoue, Y.; Yoshimura, Y.; Ikeda, Y.; Kohno, A. Colloids Surf., B 2000, 19, 257-261.