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Volumn 47, Issue 13-14, 2002, Pages 2127-2134
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Impedance spectroscopy in micro systems
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Author keywords
Al; CrNx; Hf; Micro impedance; Microcell; Passivation
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Indexed keywords
CHROMIUM COMPOUNDS;
DEFECTS;
ELECTRIC IMPEDANCE;
INORGANIC COATINGS;
MAGNESIUM ALLOYS;
PASSIVATION;
SPECTROSCOPIC ANALYSIS;
SURFACE CHEMISTRY;
SURFACE TOPOGRAPHY;
IMPEDANCE SPECTROSCOPY;
SURFACE ANALYSIS;
ELECTROCHEMICAL ELECTRODES;
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EID: 0037172265
PISSN: 00134686
EISSN: None
Source Type: Journal
DOI: 10.1016/S0013-4686(02)00085-3 Document Type: Conference Paper |
Times cited : (40)
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References (31)
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