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Volumn 413, Issue 1-2, 2002, Pages 198-202
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Refractive index profiling of CeO2 thin films using reverse engineering methods
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Author keywords
Depth profiling; Optical coatings; Optical properties; Oxides
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Indexed keywords
CERIUM COMPOUNDS;
COMPUTER SIMULATION;
ELLIPSOMETRY;
EVAPORATION;
FILM PREPARATION;
LIGHT TRANSMISSION;
MONOLAYERS;
MULTILAYERS;
OPTICAL COATINGS;
OPTICAL FILMS;
REFRACTIVE INDEX;
REVERSE ENGINEERING;
SPECTROSCOPIC ANALYSIS;
INHOMOGENEOUS FILMS;
THIN FILMS;
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EID: 0037166577
PISSN: 00406090
EISSN: None
Source Type: Journal
DOI: 10.1016/S0040-6090(02)00336-X Document Type: Article |
Times cited : (9)
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References (11)
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