Application of an anthracene containing polymer to a negative type photoresist

Bulletin of the Korean Chemical Society

Volumn 23, Issue 9, 2002, Pages 1351-1354

  Chae, Kyu Ho ^a   Kim, Yong Woon ^a   Kim, Taek Hyeon ^a  

^a Chonnam National University   (South Korea)

Author keywords

Anthracene polymer; Photo crosslinking; Photoresist

Indexed keywords

ANTHRACENE DERIVATIVE; POLYMER;

ARTICLE; CROSS LINKING; PHOTOREACTIVITY; POLYMERIZATION; REACTION ANALYSIS; SYNTHESIS;

EID: 0037145138     PISSN: 02532964     EISSN: None     Source Type: Journal    
DOI: 10.5012/bkcs.2002.23.9.1351     Document Type: Article

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