Stainless steel films deposited by dc unbalanced magnetron sputtering using SUS304 steel target

Nippon Kinzoku Gakkaishi/Journal of the Japan Institute of Metals

Volumn 64, Issue 12, 2000, Pages 1218-1223

  Inoue, Shozo ^a   Saeki, Toshiaki ^a   Koterazawa, Keiji ^a   Uchida, Hitoshi ^a   Iwasa, Mikio ^b  

^a UNIVERSITY OF HYOGO   (Japan)

^b OSAKA NATIONAL RESEARCH INSTITUTE   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CORROSION RESISTANCE; CRYSTAL ORIENTATION; HARDNESS; ION BOMBARDMENT; MAGNETRON SPUTTERING; METALLIC FILMS; RESIDUAL STRESSES; SPUTTER DEPOSITION; THIN FILMS;

STAINLESS STEEL FILMS;

STAINLESS STEEL;

EID: 0034473835     PISSN: 00214876     EISSN: None     Source Type: Journal    
DOI: 10.2320/jinstmet1952.64.12_1218     Document Type: Article

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