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Volumn 336, Issue 1-2, 2002, Pages 253-258
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Formation of the ErSi2 phase and the associated fractal pattern on the Si surface upon high current Er-ion implantation
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Author keywords
Er ion implantation; ErSi2 phase; Fractal patterns; Si
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Indexed keywords
CRYSTALLINE MATERIALS;
CURRENT DENSITY;
FRACTALS;
ION IMPLANTATION;
SEMICONDUCTING SILICON;
METAL VAPOR VACUUM ARCS (MEVVA);
ERBIUM COMPOUNDS;
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EID: 0037129090
PISSN: 09258388
EISSN: None
Source Type: Journal
DOI: 10.1016/S0925-8388(01)01874-6 Document Type: Article |
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Times cited : (3)
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References (21)
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