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Volumn 956, Issue 1-2, 2002, Pages 121-128
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Automated trace anion determinations in concentrated electronic grade phosphoric acid by ion chromatography
a
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Author keywords
Inorganic anions; Phosphoric acid; Semiconductors
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Indexed keywords
CHLORINE COMPOUNDS;
CHROMATOGRAPHIC ANALYSIS;
NEGATIVE IONS;
NITRATES;
SULFUR COMPOUNDS;
TRACE ANALYSIS;
CONDUCTIVITY DETECTION;
ION CHROMATOGRAPHY (IC);
PHOSPHORIC ACID;
ANION;
CHLORIDE;
NITRATE;
PHOSPHORIC ACID;
SULFATE;
TRACE ELEMENT;
WATER;
ADDITION REACTION;
ANALYTIC METHOD;
AUTOMATION;
CALIBRATION;
COLUMN CHROMATOGRAPHY;
CONCENTRATION RESPONSE;
CONDUCTANCE;
CONFERENCE PAPER;
ELECTRONICS;
ELUTION;
ION EXCHANGE;
ION PAIR CHROMATOGRAPHY;
PHASE SEPARATION;
PRIORITY JOURNAL;
PURIFICATION;
STANDARDIZATION;
STATISTICAL ANALYSIS;
WATER SAMPLING;
ARTICLE;
CHEMISTRY;
LIQUID CHROMATOGRAPHY;
METHODOLOGY;
REPRODUCIBILITY;
SENSITIVITY AND SPECIFICITY;
ANIONS;
CHROMATOGRAPHY, LIQUID;
PHOSPHORIC ACIDS;
REPRODUCIBILITY OF RESULTS;
SENSITIVITY AND SPECIFICITY;
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EID: 0037123456
PISSN: 00219673
EISSN: None
Source Type: Journal
DOI: 10.1016/S0021-9673(02)00117-6 Document Type: Conference Paper |
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Times cited : (22)
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References (7)
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