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Journal of Alloys and Compounds

Volumn 330-332, Issue , 2002, Pages 348-351

Modification of electrical and optical properties of metal nitride thin films by hydrogen inclusion

(3) Hayashi, Y a Ishikawa, T a Shimokawa, D a

a KYUSHU UNIVERSITY (Japan)

Author keywords

Aluminum nitride; Copper nitride; Electrical conductivity; Hydrogen; Nitride; Optical absorption

Indexed keywords

ALUMINUM NITRIDE; COPPER COMPOUNDS; ELECTRIC CONDUCTIVITY OF SOLIDS; HYDROGEN; ION IMPLANTATION; LIGHT ABSORPTION;

HYDROGEN INCLUSIONS; OPTICAL ABSORPTION COEFFICIENT;

THIN FILMS;

EID: 0037122619 PISSN: 09258388 EISSN: None Source Type: Journal
DOI: 10.1016/S0925-8388(01)01495-5 Document Type: Conference Paper

Times cited : (19)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.