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Volumn 200, Issue 1-4, 2002, Pages 104-110
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Surface metallization of alumina ceramics by pulsed high energy density plasma process
a a,b c c |
Author keywords
Alumina ceramics; Copper film; CuAl 2 O 4; Metallization; Pulsed plasma
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Indexed keywords
ALUMINA;
CERAMIC MATERIALS;
CHEMICAL BONDS;
CHEMICAL VAPOR DEPOSITION;
COPPER;
DIFFUSION;
HIGH TEMPERATURE EFFECTS;
METALLIC FILMS;
METALLIZING;
PLASMA APPLICATIONS;
QUENCHING;
REACTION KINETICS;
SUBSTRATES;
SYNTHESIS (CHEMICAL);
X RAY DIFFRACTION ANALYSIS;
PULSED HIGH ENERGY DENSITY PLASMAS (PHEDP);
SURFACE TREATMENT;
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EID: 0037110949
PISSN: 01694332
EISSN: None
Source Type: Journal
DOI: 10.1016/S0169-4332(02)00874-7 Document Type: Article |
Times cited : (24)
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References (16)
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