Observation of inversion domain boundaries in Mg-doped AlGaN layers grown by metalorganic chemical vapor deposition

Applied Surface Science

Volumn 200, Issue 1-4, 2002, Pages 138-142

  Cho, Hyung Koun ^a   Yang, Gye Mo ^b  

^a Dong A University   (South Korea)

^b Chonbuk National University   (South Korea)

Author keywords

AlGaN; Inversion domain boundary; Transmission electron microscopy

Indexed keywords

MAGNESIUM PRINTING PLATES; METALLORGANIC CHEMICAL VAPOR DEPOSITION; SAPPHIRE; SEMICONDUCTING ALUMINUM COMPOUNDS; SEMICONDUCTOR DOPING; SUBSTRATES; TRANSMISSION ELECTRON MICROSCOPY;

INVERSION DOMAIN BOUNDARIES (IBD);

SURFACE STRUCTURE;

EID: 0037110944     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(02)00845-0     Document Type: Article

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