In situ slider-to-disk spacing on a nanometer scale controlled by microheater-induced slider deformations

Sensors and Actuators, A: Physical

Volumn 100, Issue 1, 2002, Pages 123-130

  Dietzel, A ^a   Berger, R ^a   Machtle P ^a   Despont, M ^b   Haberle W ^b   Stutz, R ^b   Binnig, G K ^b   Vettiger, P ^b  

^a IBM   (Germany)

^b IBM RESEARCH ZURICH   (Switzerland)

Author keywords

Flying height actuation; Flying height simulations; Hard disk drive; Head disk interface; Microheater; Slider deformation

Indexed keywords

COMPUTER SIMULATION; HARD DISK STORAGE; INTERFEROMETRY; MECHANICAL VARIABLES CONTROL; MICROACTUATORS; MICROELECTRONIC PROCESSING; RESISTORS; THIN FILMS;

AIR BEARING SLIDERS; AIR BEARING SURFACE; MICROHEATER INDUCED SLIDER DEFORMATIONS; MICRORESISTOR HEATING; NANOMETER SCALE CONTROL; POLARITY; SLIDER-TO-DISK SPACING; THIN FILM MICRORESISTORS;

MICROELECTROMECHANICAL DEVICES;

EID: 0037103984     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(02)00138-3     Document Type: Article

References (10)

1. Electrostatic microactuator and design considerations for HDD applications
2. Process for independent control of crown and camber for magnetic head sliders
3. Head medium clearance and lateral track registration of a recording head as measured from the read-back signal
4. Flying height measurement while seeking in hard-disk drives
5. Simulations
6. Simulations