Submicronic thermal imaging by wavelength multiplexed photoreflectance technique

Electronics Letters

Volumn 38, Issue 17, 2002, Pages 986-987

  Hole S ^a   Tessier, G ^a   Filloy, C ^a   Fournier, D ^a  

^a SORBONNE UNIVERSITÉ   (France)

Author keywords

[No Author keywords available]

Indexed keywords

CHARGE COUPLED DEVICES; ELECTRODES; FREQUENCIES; INTEGRATED CIRCUITS; LIGHT EMITTING DIODES; LIGHT REFLECTION; NICKEL COMPOUNDS; SEMICONDUCTING GALLIUM ARSENIDE; SEMICONDUCTING SILICON COMPOUNDS; VIDEO CAMERAS;

CHARGE COUPLED DEVICE CAMERA; SIMULTANEOUS MULTIWAVELENGTH ILLUMINATION; SUBMICRONIC THERMAL IMAGING; WAVELENGTH MULTIPLEXED PHOTOREFLECTANCE TECHNIQUE;

INFRARED IMAGING;

EID: 0037102065     PISSN: 00135194     EISSN: None     Source Type: Journal    
DOI: 10.1049/el:20020685     Document Type: Article

References (5)

1. A surface temperature limit detector using nematic liquid cristals with an application to microcircuits
2. Micro-raman spectroscopy for characterization of semiconductor devices
3. Failure analysis of integrated devices by scanning thermal microscopy
4. Micron scale photothermal imaging
5. Quantitative thermal imaging by synchronous thermoreflectance with optimized illumination wavelengths