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Volumn 21, Issue 8, 2002, Pages 647-648

Microstructural and analytical investigation of low temperature crystallized amorphous silicon/crystallized silicon interface using SEM and EDS

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS SILICON; ANNEALING; CRYSTALLIZATION; ENERGY DISPERSIVE SPECTROSCOPY; INTERFACES (MATERIALS); LOW TEMPERATURE EFFECTS; MICROSTRUCTURE; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTOR DOPING; SILANES; SILICON WAFERS; SINGLE CRYSTALS; SUBSTRATES;

EID: 0037092026     PISSN: 02618028     EISSN: None     Source Type: Journal    
DOI: 10.1023/A:1015600423981     Document Type: Article
Times cited : (7)

References (8)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.