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Volumn 21, Issue 8, 2002, Pages 647-648
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Microstructural and analytical investigation of low temperature crystallized amorphous silicon/crystallized silicon interface using SEM and EDS
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Author keywords
[No Author keywords available]
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Indexed keywords
AMORPHOUS SILICON;
ANNEALING;
CRYSTALLIZATION;
ENERGY DISPERSIVE SPECTROSCOPY;
INTERFACES (MATERIALS);
LOW TEMPERATURE EFFECTS;
MICROSTRUCTURE;
PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;
SCANNING ELECTRON MICROSCOPY;
SEMICONDUCTOR DOPING;
SILANES;
SILICON WAFERS;
SINGLE CRYSTALS;
SUBSTRATES;
ALUMINUM INDUCED CRYSTALLIZATION (AIC);
POLYCRYSTALLINE MATERIALS;
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EID: 0037092026
PISSN: 02618028
EISSN: None
Source Type: Journal
DOI: 10.1023/A:1015600423981 Document Type: Article |
Times cited : (7)
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References (8)
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