|
Volumn 65, Issue 15, 2002, Pages 1553151-1553155
|
Kinetic roughening of GaAs(001) during thermal Cl2 etching
a a a a a |
Author keywords
[No Author keywords available]
|
Indexed keywords
CHLORINE;
GALLIUM;
ACCURACY;
ARTICLE;
ATOMIC FORCE MICROSCOPY;
CHEMICAL REACTION KINETICS;
LIGHT SCATTERING;
MATHEMATICAL ANALYSIS;
NOISE;
SURFACE PROPERTY;
THERMAL ANALYSIS;
|
EID: 0037089181
PISSN: 01631829
EISSN: None
Source Type: Journal
DOI: None Document Type: Article |
Times cited : (5)
|
References (17)
|