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Volumn 91, Issue 6, 2002, Pages 3896-3903
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Hydrogen detection on bare SiO2 between metal gates
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Author keywords
[No Author keywords available]
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Indexed keywords
DIFFERENT DISTRIBUTIONS;
FIELD-EFFECT STRUCTURE;
GAS SENSING;
GEOMETRICAL CONSTRAINTS;
HYDROGEN DETECTION;
INSULATOR SURFACES;
LOCAL RESPONSE;
METAL GATE;
METAL-OXIDE-SEMICONDUCTOR CAPACITORS;
NEGATIVE VOLTAGE;
PD CONTACTS;
PD GATES;
SCANNING LIGHT PULSE TECHNIQUE;
SEMI-CONDUCTOR SURFACES;
SEMIEMPIRICAL MODELS;
VOLTAGE CURVE;
HYDROGEN;
PHOTOCURRENTS;
PALLADIUM;
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EID: 0037087432
PISSN: 00218979
EISSN: None
Source Type: Journal
DOI: 10.1063/1.1450025 Document Type: Article |
Times cited : (10)
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References (24)
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