Nanowear in scanning force microscopy: Information on deposits formed in and downstream of a hexane plasma

Journal of Applied Physics

Volumn 91, Issue 6, 2002, Pages 3841-3846

  Dinelli, F ^a   Leggett, G J ^a   Alexander, M R ^b  

^a UNIVERSITY OF MANCHESTER   (United Kingdom)

^b UNIVERSITY OF MANCHESTER   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

CHARACTERIZATION TECHNIQUES; CONTACT MODES; CRITICAL LOAD; CROSS-LINK DENSITIES; DEPOSITION TIME; NANOWEAR; OUTER SURFACE; PLASMA REGION; WEAR MODES;

DEPOSITS; HEXANE; NANOINDENTATION; PLASMAS; SCANNING TUNNELING MICROSCOPY; THIN FILMS; VAPOR DEPOSITION;

PLASMA DEPOSITION;

EID: 0037087353     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1446220     Document Type: Article

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