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Volumn 197, Issue 1-2, 2002, Pages 23-35

Fabrication of carbon coated ceramic membranes by pyrolysis of methane using a modified chemical vapor deposition apparatus

Author keywords

Carbon coated membrane; Chemical vapor deposition; Pyrolysis of methane

Indexed keywords

CERAMIC MATERIALS; CHEMICAL VAPOR DEPOSITION; ELECTRIC RESISTANCE; HYDROPHOBICITY; POROUS MATERIALS; PYROLYSIS; SCANNING ELECTRON MICROSCOPY; THERMAL CONDUCTIVITY;

EID: 0037086756     PISSN: 03767388     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0376-7388(01)00604-4     Document Type: Article
Times cited : (37)

References (35)
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    • 0008062958 scopus 로고    scopus 로고
    • P.K.T. Liu, G.R. Gallaher, J.C.S. Wu, Method of producing a carbon coated ceramic membrane and associated product, U.S. Patent 5,262,198 (1993).
  • 14
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    • A. Soffer, M. Azariah, A. Amar, H. Cohen, D. Golub, S. Saguee, H. Tobias, Method of improving the selectivity of carbon membranes by chemical carbon vapor deposition, U.S. Patent 5,695,818 (1997).
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    • Pyrolytic carbon deposition from methane: an analytical approach to the chemical process
    • (1990) Carbon , vol.28 , pp. 207-219
    • Lucas, P.1    Marchand, A.2
  • 35
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    • A. Sherman, Chemical Vapor Deposition for Microelectronics, Noyes Publications, Park Ridge, NJ, 1987.


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.