Design of miniaturized nitrite sensors based on silicon structure with back-side contacts

Sensors and Actuators, B: Chemical

Volumn 83, Issue 1-3, 2002, Pages 109-114

  Wygl, K ^a   Malinowska, E ^a   Jawinski J ^b   Brzozka Z ^a  

^a WARSAW UNIVERSITY OF TECHNOLOGY   (Poland)

^b Department of Micro and Nanotechnology of Wide Bandgap Semiconductors   (Poland)

Author keywords

Back side contact chip; Ion selective membrane; Ion selective sensors

Indexed keywords

CHEMICAL VAPOR DEPOSITION; CONTACT SENSORS; ELECTRODEPOSITION; ELECTROLYTES; ION SELECTIVE MEMBRANES; PASSIVATION; SILICON NITRIDE;

ION-SELECTIVE SENSORS;

SILICON SENSORS;

EID: 0037086664     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-4005(01)01052-8     Document Type: Conference Paper

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