MBE source for germanium-carbon co-evaporation

Materials Science and Engineering: B

Volumn 89, Issue 1-3, 2002, Pages 332-335

  Oehme, M ^a   Bauer, M ^a   Kasper, E ^a  

^a UNIVERSITY OF STUTTGART   (Germany)

Author keywords

Effusion cell; Germanium carbon coevaporation; Molecular beam epitaxy (MBE)

Indexed keywords

CARBON; CLOSED LOOP CONTROL SYSTEMS; CRUCIBLES; EVAPORATION; GERMANIUM; HEAT TREATMENT; HETEROJUNCTION BIPOLAR TRANSISTORS; MASS SPECTROMETERS; SECONDARY ION MASS SPECTROMETRY; SEMICONDUCTOR DOPING; SILICON ALLOYS;

CARBON CRUCIBLES; COEVAPORATION;

MOLECULAR BEAM EPITAXY;

EID: 0037074783     PISSN: 09215107     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0921-5107(01)00771-1     Document Type: Conference Paper

References (2)