Formation of Al x Ga 1-x As periodic array of micro-hexagonal pillars and air holes by selective area MOVPE

Applied Surface Science

Volumn 190, Issue 1-4, 2002, Pages 236-241

  Takeda, Junichiro ^a   Akabori, Masashi ^a   Motohisa, Junichi ^a   Fukui, Takashi ^a  

^a HOKKAIDO UNIVERSITY   (Japan)

Author keywords

Air hole array; Pillar array; Selective area MOVPE

Indexed keywords

INTERFACES (MATERIALS); MASKS; METALLORGANIC VAPOR PHASE EPITAXY; OPTICAL COMMUNICATION; SEMICONDUCTING GALLIUM ARSENIDE; SPONTANEOUS EMISSION;

PHOTONIC CRYSTALS (PC);

CRYSTAL LATTICES;

EID: 0037042044     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(01)00886-8     Document Type: Conference Paper

References (10)