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Journal of Physics D: Applied Physics

Volumn 35, Issue 11, 2002, Pages

RAS - A new process control tool in liquid crystal device fabrication

(4) Macdonald, B F a Zheng, W a Cole, R J a Underwood, I a

a UNIVERSITY OF EDINBURGH (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ANISOTROPY; ATOMIC FORCE MICROSCOPY; BIREFRINGENCE; DIAMOND LIKE CARBON FILMS; ENERGY TRANSFER; ETCHING; ION BEAMS; LIGHT REFLECTION; ORGANIC POLYMERS; PROCESS CONTROL; SEMICONDUCTOR DEVICE MANUFACTURE; SPECTROSCOPIC ANALYSIS; SURFACES;

REFLECTION ANISOTROPY SPECTROSCOPY (RAS);

LIQUID CRYSTAL DISPLAYS;

EID: 0037035966 PISSN: 00223727 EISSN: None Source Type: Journal
DOI: 10.1088/0022-3727/35/11/102 Document Type: Article

Times cited : (7)

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