Investigation of stored energy in plasma deposited TiNx films

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 15, Issue 6, 1997, Pages 2938-2944

  Wulff, H ^a   Eggs, C ^a  

^a UNIVERSITY OF GREIFSWALD   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0031477553     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.580888     Document Type: Article

References (24)

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