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Volumn 19, Issue 1-2, 2002, Pages 397-400

Hydrogen-induced formation of defects nanocluster in crystalline silicon

Author keywords

Clusters; Defects; EPR; Hydrogen; Silicon

Indexed keywords

ANNEALING; DEFECTS; HYDROGEN; ION BEAMS; MULTILAYERS; PARAMAGNETIC RESONANCE; SILICON;

EID: 0037006067     PISSN: 09284931     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0928-4931(01)00430-1     Document Type: Article
Times cited : (9)

References (24)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.