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Volumn 19, Issue 1-2, 2002, Pages 397-400
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Hydrogen-induced formation of defects nanocluster in crystalline silicon
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Author keywords
Clusters; Defects; EPR; Hydrogen; Silicon
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Indexed keywords
ANNEALING;
DEFECTS;
HYDROGEN;
ION BEAMS;
MULTILAYERS;
PARAMAGNETIC RESONANCE;
SILICON;
VACANCIES CLUSTERS;
NANOSTRUCTURED MATERIALS;
DEFECT;
NANOCRYSTAL;
SILICON;
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EID: 0037006067
PISSN: 09284931
EISSN: None
Source Type: Journal
DOI: 10.1016/S0928-4931(01)00430-1 Document Type: Article |
Times cited : (9)
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References (24)
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