Modeling and designing quadratic membrane structures

Microelectronics Journal

Volumn 33, Issue 1-2, 2002, Pages 11-19

  Peters, D ^a   Bolte, H ^a   Marschner, C ^a   Rehfuss, S ^a   Laur, R ^a  

^a UNIVERSITY OF BREMEN   (Germany)

Author keywords

Capacitive pressure sensor; Large deflections; Modeling; Optimization; Quadratic membrane; Small deflections

Indexed keywords

COMPUTER SIMULATION; DEFLECTION (STRUCTURES); HEURISTIC METHODS; MATHEMATICAL MODELS; MEMBRANES; MICROELECTROMECHANICAL DEVICES; MICROSENSORS; OPTIMIZATION;

MICROSYSTEMS; PRESSURE SENSORS; QUADRATIC MEMBRANE STRUCTURES;

MICROELECTRONICS;

EID: 0037005965     PISSN: 00262692     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0026-2692(01)00099-4     Document Type: Conference Paper

References (15)

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8. An automatic method for finding the greatest or least value of a function
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