Estimation and control of surface roughness in thin film growth using kinetic Monte-Carlo models

Proceedings of the IEEE Conference on Decision and Control

Volumn 1, Issue , 2002, Pages 223-231

  Lou, Yiming ^a   Christofides, Panagiotis D ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ADAPTIVE FILTERING; ESTIMATION; FILM GROWTH; KINETIC THEORY; MATHEMATICAL MODELS; MEASUREMENT ERRORS; MONTE CARLO METHODS; PARTIAL DIFFERENTIAL EQUATIONS; ROUGHNESS MEASUREMENT; SURFACE ROUGHNESS; THIN FILMS; TWO TERM CONTROL SYSTEMS;

KINETIC MONTE CARLO MODELS; STAGNATION FLOW GEOMETRY;

DISTRIBUTED PARAMETER CONTROL SYSTEMS;

EID: 0036993668     PISSN: 01912216     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (14)

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