FEM/BEM simulation and experimental study of LLSAW resonator characteristics on YZ-LiNbO3

Proceedings of the IEEE Ultrasonics Symposium

Volumn 1, Issue , 2002, Pages 317-320

  Makkonen, Tapani ^a   Plessky, Victor P ^b   Grigorievski, Valeri I ^c   Kopp, Laurent ^d   Solal, Marc ^d   Steichen, William ^d   Salomaa, Martti M ^a  

^a AALTO UNIVERSITY   (Finland)

^b THALES   (France)

^c RUSSIAN ACADEMY OF SCIENCES   (Russian Federation)

^d Thales Microsonics   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC SURFACE WAVE DEVICES; ACOUSTIC TRANSDUCERS; BOUNDARY ELEMENT METHOD; COMPUTER SIMULATION; ELECTRODES; FINITE ELEMENT METHOD; GREEN'S FUNCTION; LITHIUM NIOBATE; METALLIZING; NATURAL FREQUENCIES; YTTRIUM COMPOUNDS;

ALUMINUM THICKNESS; LONGITUDINAL LEAKY SURFACE ACOUSTIC WAVE RESONATOR; METALLIZATION RATIO; METALLIZATION THICKNESS;

ACOUSTIC RESONATORS;

EID: 0036989175     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)

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