Multi-response optimization using principal component analysis and grey relational analysis

International Journal of Industrial Engineering : Theory Applications and Practice

Volumn 9, Issue 4, 2002, Pages 343-350

  Tong, Lee Ing ^a   Wang, Chung Ho ^b  

^a NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

^b Department of Industrial Engineering and Management   (Taiwan)

Author keywords

Grey relational analysis; Grey system theory; Multi response problems; Principal component analysis; Taguchi method

Indexed keywords

CHEMICAL MECHANICAL POLISHING; COPPER; INTEGRATED CIRCUIT MANUFACTURE; OPTIMIZATION; PRINCIPAL COMPONENT ANALYSIS; SYSTEM THEORY; THIN FILMS;

COPPER THIN FILMS; GREY RELATIONAL ANALYSIS; MULTI-RESPONSE OPTIMIZATION; OVERALL QUALITY PERFORMANCE INDEX; TAGUCHI METHOD;

QUALITY ASSURANCE;

EID: 0036961867     PISSN: 10724761     EISSN: 1943670X     Source Type: Journal    
DOI: None     Document Type: Article

References (11)

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