Preparation and surface characteristics of poly[(diphenylmethyltrifluoropropylsiloxane)-b-Polyimide] copolymer as an interlayer dielectric material

Journal of Inorganic and Organometallic Polymers

Volumn 12, Issue 3-4, 2002, Pages 79-97

  Kang, Doo Whan ^a   Kim, Young Min ^a  

^a Dankook University   (South Korea)

Author keywords

, aminopropyl poly (methyltrifluoropropylsiloxane); , aminopropyl poly(diphenyl co methyltrifluoropropylsiloxane) prepolymers; Dielectric constant; Polyorganofluorosiloxane b Polyimide; X ray photoelectron spectroscopy

Indexed keywords

COPOLYMER; ORGANOFLUORINE DERIVATIVE; POLY[(DIPHENYLMETHYLTRIFLUOROPROPYLSILOXANE) B POLYIMIDE]; POLYIMIDE; SILOXANE; UNCLASSIFIED DRUG;

ARTICLE; CHEMICAL ANALYSIS; CHEMICAL REACTION; DIELECTRIC CONSTANT; HYDROPHOBICITY; SEPARATION TECHNIQUE; SURFACE PROPERTY; SYNTHESIS; X RAY PHOTOELECTRON SPECTROSCOPY;

EID: 0036958268     PISSN: 10530495     EISSN: None     Source Type: Journal    
DOI: 10.1023/A:1021253612596     Document Type: Article

References (15)

1. S. J. Ding, Q. Q. Zhang, D. W. Zhang, J. T. Wang, Y. D. Zhou, and W. W. Lee, Appl. Surf. Sci. 178, 140 (2001).
2. J. V. Crivello and R. Malik, J. Polym. Sci., Part A: Polym. Chem. Ed. 35, 407 (1997).
3. N. Takamura, T. Gunji, H. Hatano, and Y. Abe, J. Polym. Sci., Part A: Polym. Chem. Ed. 37, 1017 (1999).
4. J. Yu, M. Ree, T. J. Shin, X. Wang, W. Cal, D. Zhou, and K. W. Lee, J. Polym. Sci., Part B: Polym. Phys. Ed. 37, 2806 (1999).
5. D. W. Kang and Y. M. Kim, J. Ind. Eng. Chem. 5, 280 (1999).
6. D. W. Kang and Y. M. Kim, J. Appl. Polym. Sci. 85, 2867 (2002).
7. C. Elsbernd, M. Spinu, V. Krukonis, P. Gallagher, D. Mohanty, and J. McGrath, in Silicon-Based Polymer Science: A Comprehensive Resource, J. M. Zeigler and F. W. Fearon, eds., Advances In Chemistry Series 224 (American Chemical Society, Washington, D.C., 1990), p. 148.
8. J. C. Coburn and M. T. Pottiger, in Polyimides: Fundamentals and Applications, M. K. Ghosh and K. L. Mittal, eds. (Marcel Dekker, New York, 1996), p. 221.
9. H. Ichikawa, F. Machino, H. Teranishi, and T. Ishikawa, in Silicon-Based Polymer Science: A Comprehensive Resource, J. M. Zeigler and F. W. Fearon, eds., Advances In Chemistry Series 224 (American Chemical Society, Washington, D.C., 1990), p. 619.
10. G. Xu, C. C. Gryte, A. S. Nowick, and S. Z. Li, J. Appl. Phys. 66, 5290 (1989).
11. N. Frukawa, M. Yuasa, F. Omori, and Y. Yamada, J. Adhesion 59, 281 (1996).
12. F. W. Mercer and M. T. McKenzie, High Perf. Polym. 5, 97 (1993).
13. S. Wu, in Polymer Interface and Adhesion (Marcel Dekker, New York, 1982), Chap. 2.
14. G. Hougham, G. Tesoro, and A. Viehbeck, Macromolecules 29, 3453 (1996).
15. A. Eftekhari, A. K. St. Clair, D. M. Stoakley, S. Kuppa, and J. J. Singh, Polym. Mater. Sci. Eng. 66, 279 (1992).