Effects of deuterium-plasma treatment at the a-Si:H/a-SiN:H interface on the field-effect mobility of a thin-film transistor

Journal of the Korean Physical Society

Volumn 41, Issue 6, 2002, Pages 1063-1067

  Bae, Seong Chan ^a   Oh, Sun Tek ^a   Park, Lee Soon ^a   Choi, Sie Young ^a   Moon, Kyo Ho ^a  

^a NONE

Author keywords

Deuterium; Mobility; TFT

Indexed keywords

EID: 0036956563     PISSN: 03744884     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Conference Paper

References (8)

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