Modeling copper diffusion in silicon oxide, nitride, and carbide

Materials Research Society Symposium - Proceedings

Volumn 716, Issue , 2002, Pages 401-406

  Zubkov, Vladimir ^a   Han, Joseph ^b   Sun, Grace ^a   Musgrave, Charles ^b   Aronowitz, Sheldon ^a  

^a AGERE SYSTEMS   (United States)

^b STANFORD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTIVATION ENERGY; COMPUTER SIMULATION; COPPER; DIFFUSION IN SOLIDS; NUMERICAL METHODS; PROBABILITY DENSITY FUNCTION; SILICON CARBIDE; SILICON NITRIDE;

COPPER DIFFUSION; SILICON OXIDE;

OXIDES;

EID: 0036955157     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-716-b8.4     Document Type: Conference Paper

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