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Volumn , Issue , 2002, Pages 1302-1305

Low-temperature growth of poly-crystalline silicon films using SiCl4 and H2 mixture

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL STRUCTURE; ENERGY DISPERSIVE SPECTROSCOPY; FILM GROWTH; GRAIN SIZE AND SHAPE; HYDROGEN; LOW TEMPERATURE EFFECTS; PHOTOCONDUCTIVITY; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; POLYCRYSTALLINE MATERIALS; RAMAN SPECTROSCOPY; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTING SILICON;

EID: 0036949009     PISSN: 01608371     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper
Times cited : (1)

References (8)
  • 1
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    • 4 feed gas for depositing polycrystalline silicon films at low temperature
    • 4 Feed Gas for Depositing Polycrystalline Silicon Films at Low Temperature" Jpn. J. Appl. Phys., 36, 1997, pp. 6625-6632.
    • (1997) Jpn. J. Appl. Phys. , vol.36 , pp. 6625-6632
    • Moniruzzaman, S.1
  • 2
    • 0012619550 scopus 로고    scopus 로고
    • 2 plaama
    • 2 Plaama", Thin Solid Films, 337, 1999, pp. 7-11.
    • (1999) Thin Solid Films , vol.337 , pp. 7-11
    • Lee, B.1
  • 5
    • 0032065187 scopus 로고    scopus 로고
    • Recent progress in micromorph solar cells
    • J. Meier et al., "Recent progress in micromorph solar cells", J. Non-crys. Solid 227-230, pp. 1998, 1250-1256.
    • (1998) J. Non-Crys. Solid , vol.227-230 , pp. 1250-1256
    • Meier, J.1
  • 7
    • 0000431794 scopus 로고    scopus 로고
    • In situ observation of nucleation and subsequent growth of clusters in silane radio frequency discharges
    • K. Koga et al., "In situ observation of nucleation and subsequent growth of clusters in silane radio frequency discharges", Appl. Phys. Lett., 77, 2000, pp. 196-198.
    • (2000) Appl. Phys. Lett. , vol.77 , pp. 196-198
    • Koga, K.1
  • 8
    • 0001694723 scopus 로고    scopus 로고
    • Low temperature growth of crystalline silicon on a chlorine-terminated surface
    • L. Guo et al., "Low temperature growth of crystalline silicon on a chlorine-terminated surface", Appl. Phys. Lett., 75, 1999, pp. 3515-3317.
    • (1999) Appl. Phys. Lett. , vol.75 , pp. 3515-3317
    • Guo, L.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.