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Volumn , Issue , 2002, Pages 1302-1305
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Low-temperature growth of poly-crystalline silicon films using SiCl4 and H2 mixture
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Author keywords
[No Author keywords available]
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Indexed keywords
CRYSTAL STRUCTURE;
ENERGY DISPERSIVE SPECTROSCOPY;
FILM GROWTH;
GRAIN SIZE AND SHAPE;
HYDROGEN;
LOW TEMPERATURE EFFECTS;
PHOTOCONDUCTIVITY;
PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;
POLYCRYSTALLINE MATERIALS;
RAMAN SPECTROSCOPY;
SCANNING ELECTRON MICROSCOPY;
SEMICONDUCTING SILICON;
CRYSTALLINITY;
LOW TEMPERATURE GROWTH;
POLYCRYSTALLINE SILICON FILM;
THIN FILMS;
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EID: 0036949009
PISSN: 01608371
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
Times cited : (1)
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References (8)
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